AKI, autocollimators for precision angle measurement

Products - SAZ V8 - Dual Wave length Static Attitude Measurement Probe

Overview

printer friendly view

AKI is proud to introduce the SAZ V8 Probe.
This probe utilizes two chromatically-separated lasers, allowing for the independent optimization of angle and Z ht measurements. The SAZ V8 is a direct replacement for the Veeco SAT probe.
Independent Angle and Z lasers
- eliminates unwanted tradeoffs
- User selectable angle spot size
- Spots are easily positioned relative to one another

Both lasers are normally incident to substrate

Improved Signal / Noise for Angle measurement

Direct replacement for Veeco SAT probes
- Replacement SATIS software option available.

Request Quote

View Available Downloads

Features

Preliminary Performance Specifications

	PSA	RSA	Z Height
Sensor Technology	1/2" CCD		1/2" CCD
Laser Wavelength / Power	635 nm / < 2mW		532 nm / 1mW
Measurement Range¹	7.5°	5.5°	±2mm
Resolution (n=1)	0.0003°		0.10 µm
Resolution (n=5)	NA		0.06 µm
RMS Repeatability	0.0003°		0.10 µm
Linearity⁴	1.5% / 4° range		TBD
Temperature Characteristics	NA		0.02% FS/°F
Spot Size³	0.1-1mm		~50µm
Measurement speed³	35 msec		35 msec

Actual measurement range. Sensor range is 10% larger.
User selectable aperture for angle measurement laser.
PSA / RSA measurments are simultaneous. HS (High Speed) option available to simultaneously acquire PSA, RSA, and Z-height.
Uncompensated linearity. LUT or Empirical compensation can reduce angular
linearity to <0.50%.

Software

Setup Program
Each probe comes with a simple yet powerful sample program which is very useful for setup, troubleshooting, testing and learning.

Custom Program
AKI can also provide a custom program tailored to the customer’s exact needs. This can include interfacing with other hardware and/or motion control.

Integration into your own program.
Developers can choose to write their own program using the AKI Software Libraries. You may choose from either an ActiveX COM object or a .NET dll in order to communicate with the AKI Probe. Integration is extremely simple and source code examples are supplied for any development language.

Compatible Development Environments;

Visual C++ 6.0 MFC
Visual Basic 6.0
C#.NET VS 2003/2005
VB.NET VS 2003/2005
C++.NET VS 2003/2005
Labview 7.1/8.0

*Software is based on Cognex Vision Pro Libraries

Compatible Operating Systems

Win2000
WinNT4 SP6
WinXP (SP1, SP2)

V8 Mounting Diagram

Documents

SAZ V8 Information - V8 Information

AKI Probe Software Description - Sample Program Provided for Testing and Setup

created by Vivid Image