Products - SAZ V9
- AKI is thrilled to introduce the SAZ V9 probe.
This probe utilizes two chromatically-separated lasers, allowing for the independent optimization of angle and Z ht measurements. The SAZ V9 is a direct replacement for AKI’s SAZ V6 family of probes.
- Independent Angle and Z lasers
- eliminates unwanted tradeoffs
- User selectable angle spot size
- Spots are easily positioned relative to one another
- Both lasers are normally incident to substrate
- Improved Signal / Noise for Angle measurement
- It incorporate two lasers allowing independent optimization of angle and z ht measurements.
- The v9 is a direct replacement for the AKI SAZ v6 family of probes.
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Features |
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Preliminary Performance Specifications |
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PSA |
RSA |
Z Height |
| Sensor Technology |
1/2" CCD |
1/2" CCD |
| Laser Wavelength / Power |
635 nm / < 1mW |
532 nm / 1mW |
| Measurement Range1 |
9.6° |
7.2° |
±2mm |
| Resolution (n=1) |
0.0003° |
0.10 µm |
| Resolution (n=5) |
NA |
0.06 µm |
| RMS Repeatability |
0.0003° |
0.10 µm |
| Linearity4 |
1.5% / 4° range |
TBD |
| Temperature Characteristics |
NA |
0.02% FS/°F |
| Spot Size2 |
0.1-1mm |
~50µm |
| Measurement speed3 |
35 msec |
35 msec |
- Actual measurement range. Sensor range is 10% larger.
- User selectable aperture for angle measurement laser.
- PSA / RSA measurments are simultaneous. HS (High Speed) option available to simultaneously acquire PSA, RSA, and Z-height.
- Uncompensated linearity. LUT or Empirical compensation can reduce angular
linearity to <0.50%.
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Software |
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Setup Program
Each probe comes with a simple yet powerful sample program which is very useful for setup, troubleshooting, testing and learning.
Custom Program
AKI can also provide a custom program tailored to the customer’s exact needs. This can include interfacing with other hardware and/or motion control.
Integration into your own program.
Developers can choose to write their own program using the AKI Software Libraries. You may choose from either an ActiveX COM object or a .NET dll in order to communicate with the AKI Probe. Integration is extremely simple and source code examples are supplied for any development language. |
Compatible Development Environments;
- Visual C++ 6.0 MFC
- Visual Basic 6.0
- C#.NET VS 2003/2005
- VB.NET VS 2003/2005
- C++.NET VS 2003/2005
- Labview 7.1/8.0
*Software is based on Cognex Vision Pro Libraries
Compatible Operating Systems
- Win2000
- WinNT4 SP6
- WinXP (SP1, SP2)
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V9 Mounting Diagram |
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Documents |
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